Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED

Meng Zhiguo; Kwok Hoising; Wu Chunya; Wong Man; Xiong Shaozhen

Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education,Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology,Institute of Photo-Electronic Thin Film Devices and Technology,Collage of Informa
Department of Electrical & Electronic Engineering,Hong Kong University of Science and Technology,Hong Kong,China
Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education,Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology,Institute of Photo-Electronic Thin Film Devices and Technology,Collage of Informa
Department of Electrical & Electronic Engineering,Hong Kong University of Science and Technology,Hong Kong,China
Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education,Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology,Institute of Photo-Electronic Thin Film Devices and Technology,Collage of Informa

Article Navigation > Journal of Semiconductors > 2006 > 27(8): 1514-1517

Meng Zhiguo, Kwok Hoising, Wu Chunya, Wong Man, Xiong Shaozhen. Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED[J]. Journal of Semiconductors, 2006, In Press. Meng Z G, Kwok H, Wu C Y, Wo N M, Xiong S Z. Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED[J]. Chin. J. Semicond., 2006, 27(8): 1514.Export: BibTex EndNote

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Meng Zhiguo, Kwok Hoising, Wu Chunya, Wong Man, Xiong Shaozhen. Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED[J]. Journal of Semiconductors, 2006, In Press.

Meng Z G, Kwok H, Wu C Y, Wo N M, Xiong S Z. Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED[J]. Chin. J. Semicond., 2006, 27(8): 1514.

Export: BibTex EndNote

Citation:

Meng Zhiguo, Kwok Hoising, Wu Chunya, Wong Man, Xiong Shaozhen. Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED[J]. Journal of Semiconductors, 2006, In Press.

Meng Z G, Kwok H, Wu C Y, Wo N M, Xiong S Z. Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED[J]. Chin. J. Semicond., 2006, 27(8): 1514.

Export: BibTex EndNote

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Fabrication of a 125mm Poly-Si TFT Active-Matrix Driving Color AMOLED

Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education,Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology,Institute of Photo-Electronic Thin Film Devices and Technology,Collage of Informa
Department of Electrical & Electronic Engineering,Hong Kong University of Science and Technology,Hong Kong,China
Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education,Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology,Institute of Photo-Electronic Thin Film Devices and Technology,Collage of Informa
Department of Electrical & Electronic Engineering,Hong Kong University of Science and Technology,Hong Kong,China
Key Laboratory of Opto-Electronic Information Science and Technology of the Ministry of Education,Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology,Institute of Photo-Electronic Thin Film Devices and Technology,Collage of Informa

Received Date: 2015-08-18
Accepted Date: 2006-05-10
Revised Date: 2006-05-10
Published Date: 2006-10-12

Abstract

Abstract

Disk-like large grain poly-si is formed using solution-based MIC (metal-induced crystallization).A Ni gettering treatment technique is adopted to improve the poly-Si material quality.Using this poly-Si material as the active layer,the leakage and uniformity characteristics of TFTs are improved.Additionally,the pixel circuit and their layout of the two TFTs are demonstrated.Adopting a 6-mask process similar to that of the normal a-si TFT AMLCD product line,125mm QVGA poly-si TFT active matrix panels for OLED are fabricated.A 125mm QVGA AMOLED panel,which can display color video image,is implemented using the active matrix panel.
- large grain size,
- disk-like poly-Si,
- TFT,
- OLED pixel circuit,
- active-matrix

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