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System level simulation of a micro resonant accelerometer with geometric nonlinear beams

Wenlong Jiao1, 2, , Weizheng Yuan1, 2 and Honglong Chang1, 2

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 Corresponding author: Jiao Wenlong, jwlvictory5515@mail.nwpu.edu.cn

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Abstract: Geometric nonlinear behaviors of micro resonators have attracted extensive attention of MEMS (microelectro-mechanical systems) researchers, and MEMS transducers utilizing these behaviors have been widely researched and used due to the advantages of essentially digital output.Currently, the design of transducers with nonlinear behaviors is mainly performed by numerical method and rarely by system level design method.In this paper, the geometric nonlinear beam structure was modeled and established as a reusable library component by system level modeling and simulation method MuPEN (multi port element network).A resonant accelerometer was constructed and simulated using this model together with MuPEN reusable library.The AC (alternating current) analysis results of MuPEN model agreed well with the results of architect model and the experiment results shown in the existing reference.Therefore, we are convinced that the beam component based on MuPEN method is valid, and MEMS system level design method and related libraries can effectively model and simulate transducers with geometric nonlinear behaviors if appropriate system level components are available.

Key words: micro-electro-mechanical systemssystem level simulationmicro resonant accelerometernonlinear beamresonator



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Fig. 1.  Sketch of beam with rectangular cross section.

Fig. 2.  Sketch of the resonant accelerometer.

Fig. 3.  System level schematic of the resonant accelerometer based on MuPEN library.

Fig. 4.  Fundamental frequencies of beam resonators.

Fig. 5.  AC analyses of resonators with changing bias voltage based on MuPEN model.

Fig. 6.  Central resonant frequency as function of bias voltage.

Fig. 7.  AC analyses with different $y$ axis accelerations based on MuPEN model.

Fig. 8.  Linear fitting of differential frequency variation.

Table 1.   Main parameters of the resonant accelerometer.

ParameterSymbolValue
Edge length of proof mass$lm400 μm
Release hole number/1940
Edge length of release holelh5.5 μm
Length of power arm lp400 μm
Length of resisting arm ls6.6 μm
Width of lever beamwl1.2 μm
Length of resonant beamlr400 μm
Width of resonant beam wr1.2 μm
Length of electrode le386.4 μm
Gap of electrodeg2.1 μm
Device thicknesst15 μm
Density of polysilicon ρ2330 kg/m3
Young's modulusE143 GPa
Poisson's ratioσ0.22
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Table 2.   Central frequency of left resonator according to different bias voltages.

Bias voltage (V)012345678
MuPEN (Hz)592515911958723580295503855717540275194049407
Architect (Hz)595145935258870580605690655385534705111448217
Experiment (Hz)[24]//575175676455760543655258050460/
DownLoad: CSV

Table 3.   Differential frequencies of resonant beams according to different $y$ axis accelerations.

Acceleration-1g-0.5g0g0.5g1g
MuPENLeft beam (Hz)5425254139540275391353800
Right beam (Hz)5380053913542075413954252
Difference (Hz)4522260-226-452
ArchitectDifference (Hz)4682300-234-467
Experiment[24]Difference (Hz)4582470-240-451
DownLoad: CSV
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    Received: 10 March 2015 Revised: Online: Published: 01 October 2015

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      Wenlong Jiao, Weizheng Yuan, Honglong Chang. System level simulation of a micro resonant accelerometer with geometric nonlinear beams[J]. Journal of Semiconductors, 2015, 36(10): 104007. doi: 10.1088/1674-4926/36/10/104007 W L Jiao, W Z Yuan, H L Chang. System level simulation of a micro resonant accelerometer with geometric nonlinear beams[J]. J. Semicond., 2015, 36(10): 104007. doi: 10.1088/1674-4926/36/10/104007.Export: BibTex EndNote
      Citation:
      Wenlong Jiao, Weizheng Yuan, Honglong Chang. System level simulation of a micro resonant accelerometer with geometric nonlinear beams[J]. Journal of Semiconductors, 2015, 36(10): 104007. doi: 10.1088/1674-4926/36/10/104007

      W L Jiao, W Z Yuan, H L Chang. System level simulation of a micro resonant accelerometer with geometric nonlinear beams[J]. J. Semicond., 2015, 36(10): 104007. doi: 10.1088/1674-4926/36/10/104007.
      Export: BibTex EndNote

      System level simulation of a micro resonant accelerometer with geometric nonlinear beams

      doi: 10.1088/1674-4926/36/10/104007
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