Chin. J. Semicond. > 2005, Volume 26 > Issue S1 > 82-86

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Growth of ZnO Thin Films on LSAT (111) Substrates by Radio Frequency Plasma-Assisted Molecular Beam Epitaxy

Ying Minju, Du Xiaolong, Liu Yuzi, Zeng Zhaoquan, Mei Zengxia, Zheng Hao, Yuan Hongtao, Jia Jinfeng, Xue Qikun and Zhang Ze

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Abstract: By using radio frequency plasma-assisted molecular beam epitaxy,the influence of substrate surface preconditiong and growth temperature on in-plane and polar orientations and surface morphology of ZnO thin films on LSAT (111) substrates are investigated. Rotation domains are observed in ZnO film grown at low temperature, while single-domain O-polar ZnO has been obtained with oxygen radicals pretreatment and high growth temperature. The origin of rotation domains in ZnO thin film is also discussed.

Key words: ZnO thin film RF-MBE LSAT (111) rotation domains epitaxial orientation

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2005

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      Ying Minju, Du Xiaolong, Liu Yuzi, Zeng Zhaoquan, Mei Zengxia, Zheng Hao, Yuan Hongtao, Jia Jinfeng, Xue Qikun, Zhang Ze. Growth of ZnO Thin Films on LSAT (111) Substrates by Radio Frequency Plasma-Assisted Molecular Beam Epitaxy[J]. Journal of Semiconductors, 2005, In Press. Ying M J, Du X L, Liu Y Z, Zeng Z Q, Mei Z X, Zheng H, Yuan H T, Jia J F, Xue Q K, Zhang Z. Growth of ZnO Thin Films on LSAT (111) Substrates by Radio Frequency Plasma-Assisted Molecular Beam Epitaxy[J]. Chin. J. Semicond., 2005, 26(13): 82.Export: BibTex EndNote
      Citation:
      Ying Minju, Du Xiaolong, Liu Yuzi, Zeng Zhaoquan, Mei Zengxia, Zheng Hao, Yuan Hongtao, Jia Jinfeng, Xue Qikun, Zhang Ze. Growth of ZnO Thin Films on LSAT (111) Substrates by Radio Frequency Plasma-Assisted Molecular Beam Epitaxy[J]. Journal of Semiconductors, 2005, In Press.

      Ying M J, Du X L, Liu Y Z, Zeng Z Q, Mei Z X, Zheng H, Yuan H T, Jia J F, Xue Q K, Zhang Z. Growth of ZnO Thin Films on LSAT (111) Substrates by Radio Frequency Plasma-Assisted Molecular Beam Epitaxy[J]. Chin. J. Semicond., 2005, 26(13): 82.
      Export: BibTex EndNote

      Growth of ZnO Thin Films on LSAT (111) Substrates by Radio Frequency Plasma-Assisted Molecular Beam Epitaxy

      • Received Date: 2015-08-19

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