Chin. J. Semicond. > 2004, Volume 25 > Issue 7 > 863-868
|

CONTENTS

硅基纳机电探针及其敏感和执行特性

杨尊先 , 李昕欣 , 王跃林 , 鲍海飞 , 刘民 and 陆德仁

+ Author Affiliations

PDF

Key words: 悬臂梁-针尖探针, 纳机电系统技术, 压阻敏感, 电热纳米针尖, 数据存储技术

    • Search

    Advanced Search >>

    Article Metrics

    Article views: 2304 Times PDF downloads: 810 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 July 2004

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2004  >  25(7): 863-868
      Export: BibTex EndNote
      Citation:


      Export: BibTex EndNote
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return