SEMICONDUCTOR MATERIALS

Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications

Xie Jing, Liu Yunfei, Yang Jinling, Tang Longjuan and Yang Fuhua

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Abstract: The simultaneous control of residual stress and resistivity of polysilicon thin films by adjusting the deposition parameters and annealing conditions is studied. In situ boron doped polysilicon thin films deposited at 520 ℃ by low pressure chemical vapor deposition (LPCVD) are amorphous with relatively large compressive residual stress and high resistivity. Annealing the amorphous films in a temperature range of 600–800 ℃ gives polysilicon films nearly zero-stress and relatively low resistivity. The low residual stress and low resistivity make the polysilicon films attractive for potential applications in micro-electro-mechanical-systems (MEMS) devices, especially in high resonance frequency (high-f) and high quality factor (high-Q) MEMS resonators. In addition, polysilicon thin films deposited at 570 ℃ and those without the post annealing process have low resistivities of 2–5 mΩ·cm. These reported approaches avoid the high temperature annealing process (> 1000 ), and the promising properties of these films make them suitable for high-Q and high-f MEMS devices.

Key words: low pressure chemical vapor deposition polysilicon residual stress film resistivity annealing micro-electromechanical systems

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    Received: 18 August 2015 Revised: 22 March 2009 Online: Published: 01 August 2009

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      Xie Jing, Liu Yunfei, Yang Jinling, Tang Longjuan, Yang Fuhua. Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications[J]. Journal of Semiconductors, 2009, 30(8): 083003. doi: 10.1088/1674-4926/30/8/083003 Xie J, Liu Y F, Yang J L, Tang L J, Yang F H. Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications[J]. J. Semicond., 2009, 30(8): 083003. doi:  10.1088/1674-4926/30/8/083003.Export: BibTex EndNote
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      Xie Jing, Liu Yunfei, Yang Jinling, Tang Longjuan, Yang Fuhua. Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications[J]. Journal of Semiconductors, 2009, 30(8): 083003. doi: 10.1088/1674-4926/30/8/083003

      Xie J, Liu Y F, Yang J L, Tang L J, Yang F H. Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications[J]. J. Semicond., 2009, 30(8): 083003. doi:  10.1088/1674-4926/30/8/083003.
      Export: BibTex EndNote

      Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications

      doi: 10.1088/1674-4926/30/8/083003
      • Received Date: 2015-08-18
      • Accepted Date: 2008-12-30
      • Revised Date: 2009-03-22
      • Published Date: 2009-07-31

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