Chin. J. Semicond. > 1999, Volume 20 > Issue 8 > 644-649

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直流磁控溅射制备用于G aA s M E SFET钝化的AlN的工艺研究

曹昕 , 罗晋生 , 陈堂胜 and 陈克金

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    Received: 20 August 2015 Revised: Online: Published: 01 August 1999

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      • Received Date: 2015-08-20

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