Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 193-196

Growth of High AI Content AIGaN Epilayer by MOCVD

Wang Xiaoyan, Wang Xiaoliang, Hu Guoxin, Wang Baozhu, Li Jianping, Xiao Hongling, Wang Junxi, Liu Hongxin, Zeng Yiping and Li Jinmin

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Abstract: High AI content A1GaN films are grown on sapphire substrate by metalorganie chemical vapor deposition (MOCVD) using AIN/AIGaN superlattices.Transmission measurements combined with double·crystal X-ray diffraction (DCXRD) And scanning electron microscopy (SEM) are used to characterize the AIGaN epilayers.The optical properties, crystal quality and surface morphology of A1GaN epilayers deposited at 1.33×10^4 and 0.66 X 10^4 Pa are also compared.

Key words: MOCVDA1GaNtransmittanceXRDSEM

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Wang Xiaoyan, Wang Xiaoliang, Hu Guoxin, Wang Baozhu, Li Jianping, Xiao Hongling, Wang Junxi, Liu Hongxin, Zeng Yiping, Li Jinmin. Growth of High AI Content AIGaN Epilayer by MOCVD[J]. Journal of Semiconductors, 2007, In Press. Wang X Y, Wang X L, Hu G X, Wang B Z, Li J P, Xiao H L, Wang J X, Liu H X, Zeng Y P, Li J M. Growth of High AI Content AIGaN Epilayer by MOCVD[J]. Chin. J. Semicond., 2007, 28(S1): 193.Export: BibTex EndNote
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      Wang Xiaoyan, Wang Xiaoliang, Hu Guoxin, Wang Baozhu, Li Jianping, Xiao Hongling, Wang Junxi, Liu Hongxin, Zeng Yiping, Li Jinmin. Growth of High AI Content AIGaN Epilayer by MOCVD[J]. Journal of Semiconductors, 2007, In Press.

      Wang X Y, Wang X L, Hu G X, Wang B Z, Li J P, Xiao H L, Wang J X, Liu H X, Zeng Y P, Li J M. Growth of High AI Content AIGaN Epilayer by MOCVD[J]. Chin. J. Semicond., 2007, 28(S1): 193.
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      Growth of High AI Content AIGaN Epilayer by MOCVD

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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