Chin. J. Semicond. > 2004, Volume 25 > Issue 1 > 109-114

CONTENTS

一种气(Ga)-固(Al掺杂氧化物)-固(Si)掺杂新工艺

刘秀喜 , 孙瑛 and 李玉国

PDF

Key words: 晶闸管, 受主杂质, 掺杂机制, 工艺应用

  • Search

    Advanced Search >>

    Article Metrics

    Article views: 2096 Times PDF downloads: 1878 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 January 2004

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Export: BibTex EndNote
      Citation:


      Export: BibTex EndNote

      • Received Date: 2015-08-19

      Catalog

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return