Chin. J. Semicond. > 2006, Volume 27 > Issue 9 > 1578-1581

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Preparation of AlSb Polycrystalline Thin Films by Co-Evaporation

Yao Feifei, 雷智 , Lei Zhi, 张静全 , Feng Lianghuan, Zhang Jingquan, 蔡伟 , Li Wei, Wu Lili and 黎兵

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Abstract: AlSb polycrystalline thin films are prepared by vacuum co-evaporation and post-annealing.The structural,optical,and electrical properties of the films are studied.X-ray diffraction results show that the films annealed at 540℃ are polycrystalline AlSb with a single-phase fcc structure.Optical transmission measurements indicate an indirect optical band gap of 1.62eV.The activation energy of conductivity is 0.33eV,as derived from the relation of dark conductivity versus temperature.These results show that AlSb thin films could become important materials for novel solar cells.

Key words: AlSb anneal polycrystalline thin films

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    Received: 20 August 2015 Revised: Online: Published: 01 September 2006

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      Yao Feifei, Lei Zhi, Feng Lianghuan, Zhang Jingquan, Li Wei, Wu Lili, . Preparation of AlSb Polycrystalline Thin Films by Co-Evaporation[J]. Journal of Semiconductors, 2006, In Press. Yao F F, Lei Z, Feng L H, Zhang J Q, Li W, Wu L L, Preparation of AlSb Polycrystalline Thin Films by Co-Evaporation[J]. Chin. J. Semicond., 2006, 27(9): 1578.Export: BibTex EndNote
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      Yao Feifei, Lei Zhi, Feng Lianghuan, Zhang Jingquan, Li Wei, Wu Lili, . Preparation of AlSb Polycrystalline Thin Films by Co-Evaporation[J]. Journal of Semiconductors, 2006, In Press.

      Yao F F, Lei Z, Feng L H, Zhang J Q, Li W, Wu L L, Preparation of AlSb Polycrystalline Thin Films by Co-Evaporation[J]. Chin. J. Semicond., 2006, 27(9): 1578.
      Export: BibTex EndNote

      Preparation of AlSb Polycrystalline Thin Films by Co-Evaporation

      • Received Date: 2015-08-20

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