| Citation: |
Li Wenjun, Sun Lingling, Liu Jun. A Patterned SOI LDMOSFET by Masked SIMOX for RF Power Applications[J]. Journal of Semiconductors, 2007, In Press.
Li W J, Sun L L, Liu J. A Patterned SOI LDMOSFET by Masked SIMOX for RF Power Applications[J]. Chin. J. Semicond., 2007, 28(4): 480.
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A Patterned SOI LDMOSFET by Masked SIMOX for RF Power Applications
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Abstract
A novel patterned-SOI LDMOSFET with a silicon window beneath the p-type channel was designed and fabricated for RF power amplifier applications.This novel device has good DC and RF characteristics.It has no kink effect on output performance,an off-state breakdown of up to 13V,and fT=6GHz at DC bias of Vg=Vd=3.6V.At 1.5GHz,a power-added efficiency (PAE) of 50% is achieved with an output power of up to 27dBm from this device-
Keywords:
- patterned-SOI,
- LDMOSFET,
- SIMOX,
- RF power amplifier
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References
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