Chin. J. Semicond. > 2002, Volume 23 > Issue 6 > 571-576

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高温处理对镍诱导晶化硅上的薄膜晶体管性能的影响(英文)

秦明 , 樊路加 , VincentPoon and C Y Yuen

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Key words: 镍诱导横向晶化, 薄膜晶体管, 高温处理

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2002

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      • Received Date: 2015-08-19

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