Chin. J. Semicond. > 1999, Volume 20 > Issue 6 > 448-451

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硅中氦离子注入所产生的微孔结构的吸杂作用

闵靖 , 朱剑豪 and 吕翔

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1999

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      • Received Date: 2015-08-20

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