Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 555-557

A New Method for Testing Inner Strains of Semiconductor Substrate Materials--Polarization Transmittance Difference

Zhao Linghui and Chen Yonghai

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Abstract: A new polarization transmittance difference method has been developed to measure inner strains in semiconductor substrate materials.By using polarization modulation technique in this method,the process becomes simple,quick and the re· suits become more correct for there is no need to rotate samples or polarized elements to measure many times like in other methods.Two-dimensional distribution of inner strains in integral materials can be shown.This method is non·destructive.

Key words: polarization transmittance differenceinner strainphoto-elastic effectPEM

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Zhao Linghui, Chen Yonghai. A New Method for Testing Inner Strains of Semiconductor Substrate Materials--Polarization Transmittance Difference[J]. Journal of Semiconductors, 2007, In Press. Zhao L H, Chen Y H. A New Method for Testing Inner Strains of Semiconductor Substrate Materials--Polarization Transmittance Difference[J]. Chin. J. Semicond., 2007, 28(S1): 555.Export: BibTex EndNote
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      Zhao Linghui, Chen Yonghai. A New Method for Testing Inner Strains of Semiconductor Substrate Materials--Polarization Transmittance Difference[J]. Journal of Semiconductors, 2007, In Press.

      Zhao L H, Chen Y H. A New Method for Testing Inner Strains of Semiconductor Substrate Materials--Polarization Transmittance Difference[J]. Chin. J. Semicond., 2007, 28(S1): 555.
      Export: BibTex EndNote

      A New Method for Testing Inner Strains of Semiconductor Substrate Materials--Polarization Transmittance Difference

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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