Chin. J. Semicond. > 2003, Volume 24 > Issue S1 > 85-90
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Preparation and Performances of antireflective Coating

Zhang Xuena, Xu Xueging, Shen Hui and Zheng Yuehua

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Abstract:

The preparations of silica antireflective coating on glass by sol-gel process and RF sputtering process are discussed and compared. The effects of sol concentration, aging and annealing on antireflectivity are investigated. While the sol concentration is 0.4M, aging time is 6 days and annealing temperature is 450℃, the transmittance of the coated glass can reach up to 99.3%. The structure of sol and gel is studied Using IR spectroscopy, and it is found that the Si-O-Si bonds were strengthened after aging and annealing.

Key words: silica coating,  antireflectivity,  Sol-Gel process,  IR spectroscopy

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    Received: 16 March 2016 Revised: Online: Published: 01 January 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(S1): 85-90
      Zhang Xuena, Xu Xueging, Shen Hui, Zheng Yuehua. Preparation and Performances of antireflective Coating[J]. Journal of Semiconductors, 2003, In Press. Zhang X N, X X, Shen H, Zheng Y H. Preparation and Performances ofantireflective Coating[J]. Chin. J. Semicond., 2003, 24(S1): 85.Export: BibTex EndNote
      Citation:
      Zhang Xuena, Xu Xueging, Shen Hui, Zheng Yuehua. Preparation and Performances of antireflective Coating[J]. Journal of Semiconductors, 2003, In Press.

      Zhang X N, X X, Shen H, Zheng Y H. Preparation and Performances ofantireflective Coating[J]. Chin. J. Semicond., 2003, 24(S1): 85.
      Export: BibTex EndNote
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      Preparation and Performances of antireflective Coating

      • South China University of Technology, Guangzhou 510641, China,South China University of Technology, Guangzhou 510641, China,South China University of Technology, Guangzhou 510641, China

      • Guangzhou Institute of Energy Conversion, The Chinese Academy of Sciences, Guangzhou 510070, China and South China University of Technology, Guangzhou 510641, China

      • Received Date: 2016-03-16
      • Published Date: 2016-03-15

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