| Citation: |
Zhang Yufeng, Liu Xiaowei, Chen Weiping. System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers[J]. Journal of Semiconductors, 2008, In Press.
Zhang Y F, Liu X W, Chen W P. System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers[J]. J. Semicond., 2008, 29(5): 917.
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System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers
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Abstract
This paper presents two approaches for system-level simulation of force-balance accelerometers.The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer.The mathematical model presented is implemented in VHDL-AMS and SIMULINK TM,respectively.The simulation results from the two approaches are compared and show a slight difference.Using VHDL-AMS is flexible,reusable,and more accurate.But there is not a mature solver developed for the language and this approach takes more time,while the simulation model can be easily built and quickly evaluated using SIMULINK. -
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