Chin. J. Semicond. > 1989, Volume 10 > Issue 11 > 846-852

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离子束混合诱导稀土金属Ce与Si的界面反应及硅化物的形成

杨熙宏 , 毛思宁 , 陈坚 , 刘家瑞 , 杨锋 and 许天冰

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1989

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      • Received Date: 2015-08-19

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