Chin. J. Semicond. > 2006, Volume 27 > Issue 10 > 1725-1731

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2D Threshold-Voltage Model for High-k Gate-Dielectric MOSFETs

Ji Feng, Xu Jingping, Lai P T, Chen Weibing and Li Yanping

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Abstract: New boundary conditions and a 2D potential distribution along the channel of a high-k gate-dielectric MOSFET,including both the gate dielectric material region and the depletion region,are given.Based on this distribution,a 2D threshold-voltage model with the fringing-field and short-channel effects is developed for a high-k gate-dielectric MOSFET.The model agrees well with experimental data and a quasi 2D model,and is even more accurate than the quasi 2D model at higher drain voltages.Factors affecting the threshold behavior of the high-k gate-dielectric MOSFET are discussed in detail.

Key words: high-k gate dielectricMOSFETthreshold voltagefringing fieldshort-channel effect

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    Received: 18 August 2015 Revised: 24 May 2006 Online: Published: 01 October 2006

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      Ji Feng, Xu Jingping, Lai P T, Chen Weibing, Li Yanping. 2D Threshold-Voltage Model for High-k Gate-Dielectric MOSFETs[J]. Journal of Semiconductors, 2006, In Press. Ji F, Xu J P, Lai P T, Chen W B, Li Y P. 2D Threshold-Voltage Model for High-k Gate-Dielectric MOSFETs[J]. Chin. J. Semicond., 2006, 27(10): 1725.Export: BibTex EndNote
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      Ji Feng, Xu Jingping, Lai P T, Chen Weibing, Li Yanping. 2D Threshold-Voltage Model for High-k Gate-Dielectric MOSFETs[J]. Journal of Semiconductors, 2006, In Press.

      Ji F, Xu J P, Lai P T, Chen W B, Li Y P. 2D Threshold-Voltage Model for High-k Gate-Dielectric MOSFETs[J]. Chin. J. Semicond., 2006, 27(10): 1725.
      Export: BibTex EndNote

      2D Threshold-Voltage Model for High-k Gate-Dielectric MOSFETs

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      国家自然科学基金

      • Received Date: 2015-08-18
      • Accepted Date: 2006-03-10
      • Revised Date: 2006-05-24
      • Published Date: 2006-10-12

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