Chin. J. Semicond. > 2004, Volume 25 > Issue 2 > 195-199

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低串扰平顶型刻蚀衍射光栅解复用器的设计

宋军 , 石志敏 and 何赛灵

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Key words: 刻蚀衍射光栅, 频谱平坦化, 串扰, 色散

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    History

    Received: 19 August 2015 Revised: Online: Published: 01 February 2004

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      • Received Date: 2015-08-19

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