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Modeling,Fabrication,and Characterization of a Novel Optically Driven Deformable Mirror

Xiang Dong, Wang Qingling, Zhang Guangyong and Zhou Lina

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Abstract: This paper presents a novel deformable mirror driven by a laser.The mirror is composed a 2mm-thick polymeric membrane mirror supported by a 6mm-thick grid of patterned photoresist and a photoconductive GaAs substrate.A very high-frequency AC bias is applied between the membrane and the photoconductive substrate.When the back of the device is illuminated by a laser,the carrier concentration in the GaAs increases.This causes an impedance redistribution between two cascaded impedances,and then the membrane is deformed because of the static electric effect.The working model of the mirror is analyzed,and the design and fabrication of the mirror are also presented.The effects of some operating parameters such as bias voltage and current frequency on the membrane deformation are tested by experiment.

Key words: adaptive opticsdeformable mirroroptically drivenoptical characterization

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    Received: 18 August 2015 Revised: 22 September 2006 Online: Published: 01 February 2007

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      Xiang Dong, Wang Qingling, Zhang Guangyong, Zhou Lina. Modeling,Fabrication,and Characterization of a Novel Optically Driven Deformable Mirror[J]. Journal of Semiconductors, 2007, In Press. Xiang D, Wang Q L, Zhang G Y, Zhou L N. Modeling,Fabrication,and Characterization of a Novel Optically Driven Deformable Mirror[J]. Chin. J. Semicond., 2007, 28(2): 269.Export: BibTex EndNote
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      Xiang Dong, Wang Qingling, Zhang Guangyong, Zhou Lina. Modeling,Fabrication,and Characterization of a Novel Optically Driven Deformable Mirror[J]. Journal of Semiconductors, 2007, In Press.

      Xiang D, Wang Q L, Zhang G Y, Zhou L N. Modeling,Fabrication,and Characterization of a Novel Optically Driven Deformable Mirror[J]. Chin. J. Semicond., 2007, 28(2): 269.
      Export: BibTex EndNote

      Modeling,Fabrication,and Characterization of a Novel Optically Driven Deformable Mirror

      • Received Date: 2015-08-18
      • Accepted Date: 2006-08-06
      • Revised Date: 2006-09-22
      • Published Date: 2007-01-30

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