J. Semicond. > 2013, Volume 34 > Issue 5 > 053003, doi: 10.1088/1674-4926/34/5/053003
|

SEMICONDUCTOR MATERIALS

Influence of substrate temperature on the structural and properties of In-doped CdO films prepared by PLD

Biju Zheng and Wen Hu

+ Author Affiliations

 Corresponding author: Zheng Biju, Email:zhengbiju@gmail.com

PDF

Abstract: Transparent indium-doped cadmium oxide (In-CdO) thin films were deposited on quartz glass substrates by pulsed laser deposition (PLD) from an ablating Cd-In metallic target. The effect of substrate temperature on the structural, optical and electrical properties of In-doped CdO thin films were studied in detail. The optical transmittance of In doped CdO films are obviously influenced by the substrate temperature. All films exhibit a transmittance higher than 75% in the visible region. More significantly, In-doping leads to an evident widening of optical band gap from 2.56 to 2.91 eV; and the increase in optical band gap is found to depend on the deposition temperature. It is also seen that the electrical properties of these films strongly depend on the substrate temperature. The In-CdO thin film grown at 300℃ has low resistivity (1.15×10-4 Ω·cm), high carrier concentration (5.35×1020 cm-3), and high mobility (101.43 cm2/(V· s)).

Key words: cadmium oxide, pulse laser deposition, transparent conductor oxide, Hall effect



[1]
Kim S Y, Hong K, Lee J L, et al. Enhancement of physical properties of indium tin oxide deposited by super density arc plasma ion plating by O2 plasma treatment. Solid-State Electron, 2008, 52(1):1 doi: 10.1016/j.sse.2007.07.037
[2]
Yang Z, Huang Y, Chen G, et al. Ethanol gas sensor based on Al-doped ZnO nanomaterial with many gas diffusing channels. Sensors and Actuators B:Chemical, 2009, 140(2):549 doi: 10.1016/j.snb.2009.04.052
[3]
Aksoy S, Caglar Y, Ilican S, et al. Effect of heat treatment on physical properties of CdO films deposited by sol-gel method. Int J Hydrogen Energy, 2009, 34(12):5191 doi: 10.1016/j.ijhydene.2008.09.057
[4]
Santos-Cruz J, Torres-Delgado G, Castanedo-Pérez R, et al. Au-Cu/p-CdTe/n-CdO/glass type solar cells. Sol Energy Mater Sol Cells, 2006, 90(15):2272 doi: 10.1016/j.solmat.2006.03.039
[5]
Kwon C H, Hong H K, Yun D H, et al. Thick-film zinc-oxide gas sensor for the control of lean air-to-fuel ratio in domestic combustion systems. Sens Actuators, B, 1995, 25(1-3):610 doi: 10.1016/0925-4005(95)85134-8
[6]
Ferro R, Rodriguez J A, Vigil O, et al. F-doped CdO thin films deposited by spray pyrolysis. Phys Status Solidi, A, 2000, 177:477 doi: 10.1002/(ISSN)1521-396X
[7]
Mane R S, Pathan H M, Lokhande C D, et al. An effective use of nanocrystalline CdO thin films in dye-sensitized solar cells. Sol Energy, 2006, 80(2):185 doi: 10.1016/j.solener.2005.08.013
[8]
Vijayalakshmi S, Venkataraj S, Jayavel R. Characterization of cadmium doped zinc oxide (Cd:ZnO) thin films prepared by spray pyrolysis method. J Phys D:Appl Phys, 2008, 41(24):245403 doi: 10.1088/0022-3727/41/24/245403
[9]
Zhao Z, Morel D L, Ferekides C S. Electrical and optical properties of tin-doped CdO films deposited by atmospheric metalorganic chemical vapor deposition. Thin Solid Films, 2002, 413(1/2):203
[10]
Wang X J, Buyanova I A, Chen W M, et al. Band gap properties of Zn1-xCdxO alloys grown by molecular-beam epitaxy. Appl Phys Lett, 2006, 89(15):151909 doi: 10.1063/1.2361081
[11]
Saha B, Thapa R, Chattopadhyay K K. Bandgap widening in highly conducting CdO thin film by Ti incorporation through radio frequency magnetron sputtering technique. Solid State Commun, 2008, 145(1/2):33
[12]
Flores M A, Castanedo R, Torres G, et al. Optical, electrical and structural properties of indium-doped cadmium oxide films obtained by the sol-gel technique. Sol Energy Mater Sol Cells, 2009, 93(1):28 doi: 10.1016/j.solmat.2008.02.006
[13]
Gupta R K, Ghosh K, Patel R, et al. Effect of oxygen partial pressure on structural, optical and electrical properties of titanium-doped CdO thin films. Appl Surf Sci, 2008, 255(5, Part 1):2414
[14]
Kawamura K I, Maekawa K, Yanagi H, et al. Observation of carrier dynamics in CdO thin films by excitation with femtosecond laser pulse. Thin Solid Films, 2003, 445(2):182 doi: 10.1016/S0040-6090(03)01172-6
[15]
Kul M, Zor M, Aybek A S, et al. Some structural properties of CdO:F films produced by ultrasonic spray pyrolysis method. Thin Solid Films, 2007, 515(24):8590 doi: 10.1016/j.tsf.2007.03.104
[16]
Bilgin V, Akyuz I, Kose S, et al. Characterization of Mn-incorporated CdO films grown by ultrasonic spray pyrolysis. Semicond Sci Technol, 2006, 21(5):579 doi: 10.1088/0268-1242/21/5/001
[17]
Chen T, Liu Q J, Zhou Z L, et al. A high sensitivity gas sensor for formaldehyde based on CdO and In2O3 doped nanocrystalline SnO2. Nanotechnology, 2008, 19(9):095506 doi: 10.1088/0957-4484/19/9/095506
[18]
Dakhel A A. Influence of dysprosium doping on the electrical and optical properties of CdO thin films. Sol Energy, 2009, 83(6):934 doi: 10.1016/j.solener.2008.12.015
[19]
Zhao Z, Morel D L, Ferekides C S. Electrical and optical properties of tin-doped CdO films deposited by atmospheric metalorganic chemical vapor deposition. Thin Solid Films, 2002, 413(1/2):203
[20]
Igasaki Y, Kanma H. Argon gas pressure dependence of the properties of transparent conducting ZnO:Al films deposited on glass substrates. Appl Surf Sci, 2001, 169-170(0):508
[21]
Schroder D K. Semiconductor material and device characterization. New York: John Wiley and Sons, 1990
[22]
Fan X M, Lian J S, Guo Z X, et al. Microstructure and photoluminescence properties of ZnO thin films grown by PLD on Si substrates. Appl Surf Sci, 2005, 239(2):176 doi: 10.1016/j.apsusc.2004.05.144
[23]
Zhu B L, Sun X H, Zhao X Z, et al. The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition. Vacuum, 2008, 82(5):495 doi: 10.1016/j.vacuum.2007.07.059
[24]
Aktaruzzaman A F, Sharma G L, Malhotra L K. Electrical, optical and annealing characteristics of ZnO:Al films prepared by spray pyrolysis. Thin Solid Films, 1991, 198:67 doi: 10.1016/0040-6090(91)90325-R
[25]
Parthiban S, Elangovan E, Ramamurthi K, et al. Investigations on high visible to near infrared transparent and high mobility Mo doped In2O3 thin films prepared by spray pyrolysis technique. Sol Energy Mater Sol Cells, 2010, 94(3):406 doi: 10.1016/j.solmat.2009.10.017
[26]
Shinde V R, Gujar T P, Lokhande C D, et al. Mn doped and undoped ZnO films:a comparative structural, optical and electrical properties study. Mater Chem Phys, 2006, 96(2/3):326
[27]
Burstein E. Anomalous optical absorption limit in InSb. Phys Rev, 1954, 93:632 doi: 10.1103/PhysRev.93.632
[28]
Moss T S. The interpretation of the properties of indium antimonide. Proc Phys Soc Lond B, 1954, 67:775 doi: 10.1088/0370-1301/67/10/306
[29]
Gurumurugan K, Mangalaraj D, Narayandass S K, et al. Structural, optical, and electrical properties of cadmium oxide films deposited by spray pyrolysis. Phys Status Solidi A, 1994, 143:85 doi: 10.1002/(ISSN)1521-396X
[30]
Chu T L, Chu S S. Degenerate cadmium oxide films for electronic devices. J Electron Mater, 1990, 19:1003 doi: 10.1007/BF02652928
[31]
Gurumurugan K, Mangalaraj D, Narayandass S K. Magnetron-sputtered transparent conducting CdO thin-films. J Electron Mater, 1996, 25:765 doi: 10.1007/BF02666538
Fig. 1.  XRD patterns of In-CdO thin films deposited at different temperatures.

DownLoad: Full-Size Img PowerPoint
Fig. 2.  AFM images of the surfaces of In-CdO thin films deposited at various substrate temperatures. (a) 100 ℃ . (b) 200 ℃ . (c) 300 ℃ . (d) 400 ℃ . (e) 500 ℃ . (f) 600 ℃ .

DownLoad: Full-Size Img PowerPoint
Fig. 3.  RMS roughness of In-CdO thin films deposited at various substrate temperatures.

DownLoad: Full-Size Img PowerPoint
Fig. 4.  Effect of growth temperature on resistivity ($\rho)$, carrier concentration ($n$), and mobility ($\mu)$ of In-CdO thin films.

DownLoad: Full-Size Img PowerPoint
Fig. 5.  Optical transmission spectra of In-CdO thin films deposited at different temperatures.

DownLoad: Full-Size Img PowerPoint
Fig. 6.  (a) Relation of ($\alpha h \upsilon)$$^{2}$ and $h \upsilon$ of In-CdO thin films grown at different substrate temperatures. Inset shows the optical band gap variation as function of substrate temperature. (b) Plot of band gap ($E_{\rm g})$ as function of $n^{2/3}$ ($n$ is the carrier concentration, solid line is the fitting line).

DownLoad: Full-Size Img PowerPoint
[1]
Kim S Y, Hong K, Lee J L, et al. Enhancement of physical properties of indium tin oxide deposited by super density arc plasma ion plating by O2 plasma treatment. Solid-State Electron, 2008, 52(1):1 doi: 10.1016/j.sse.2007.07.037
[2]
Yang Z, Huang Y, Chen G, et al. Ethanol gas sensor based on Al-doped ZnO nanomaterial with many gas diffusing channels. Sensors and Actuators B:Chemical, 2009, 140(2):549 doi: 10.1016/j.snb.2009.04.052
[3]
Aksoy S, Caglar Y, Ilican S, et al. Effect of heat treatment on physical properties of CdO films deposited by sol-gel method. Int J Hydrogen Energy, 2009, 34(12):5191 doi: 10.1016/j.ijhydene.2008.09.057
[4]
Santos-Cruz J, Torres-Delgado G, Castanedo-Pérez R, et al. Au-Cu/p-CdTe/n-CdO/glass type solar cells. Sol Energy Mater Sol Cells, 2006, 90(15):2272 doi: 10.1016/j.solmat.2006.03.039
[5]
Kwon C H, Hong H K, Yun D H, et al. Thick-film zinc-oxide gas sensor for the control of lean air-to-fuel ratio in domestic combustion systems. Sens Actuators, B, 1995, 25(1-3):610 doi: 10.1016/0925-4005(95)85134-8
[6]
Ferro R, Rodriguez J A, Vigil O, et al. F-doped CdO thin films deposited by spray pyrolysis. Phys Status Solidi, A, 2000, 177:477 doi: 10.1002/(ISSN)1521-396X
[7]
Mane R S, Pathan H M, Lokhande C D, et al. An effective use of nanocrystalline CdO thin films in dye-sensitized solar cells. Sol Energy, 2006, 80(2):185 doi: 10.1016/j.solener.2005.08.013
[8]
Vijayalakshmi S, Venkataraj S, Jayavel R. Characterization of cadmium doped zinc oxide (Cd:ZnO) thin films prepared by spray pyrolysis method. J Phys D:Appl Phys, 2008, 41(24):245403 doi: 10.1088/0022-3727/41/24/245403
[9]
Zhao Z, Morel D L, Ferekides C S. Electrical and optical properties of tin-doped CdO films deposited by atmospheric metalorganic chemical vapor deposition. Thin Solid Films, 2002, 413(1/2):203
[10]
Wang X J, Buyanova I A, Chen W M, et al. Band gap properties of Zn1-xCdxO alloys grown by molecular-beam epitaxy. Appl Phys Lett, 2006, 89(15):151909 doi: 10.1063/1.2361081
[11]
Saha B, Thapa R, Chattopadhyay K K. Bandgap widening in highly conducting CdO thin film by Ti incorporation through radio frequency magnetron sputtering technique. Solid State Commun, 2008, 145(1/2):33
[12]
Flores M A, Castanedo R, Torres G, et al. Optical, electrical and structural properties of indium-doped cadmium oxide films obtained by the sol-gel technique. Sol Energy Mater Sol Cells, 2009, 93(1):28 doi: 10.1016/j.solmat.2008.02.006
[13]
Gupta R K, Ghosh K, Patel R, et al. Effect of oxygen partial pressure on structural, optical and electrical properties of titanium-doped CdO thin films. Appl Surf Sci, 2008, 255(5, Part 1):2414
[14]
Kawamura K I, Maekawa K, Yanagi H, et al. Observation of carrier dynamics in CdO thin films by excitation with femtosecond laser pulse. Thin Solid Films, 2003, 445(2):182 doi: 10.1016/S0040-6090(03)01172-6
[15]
Kul M, Zor M, Aybek A S, et al. Some structural properties of CdO:F films produced by ultrasonic spray pyrolysis method. Thin Solid Films, 2007, 515(24):8590 doi: 10.1016/j.tsf.2007.03.104
[16]
Bilgin V, Akyuz I, Kose S, et al. Characterization of Mn-incorporated CdO films grown by ultrasonic spray pyrolysis. Semicond Sci Technol, 2006, 21(5):579 doi: 10.1088/0268-1242/21/5/001
[17]
Chen T, Liu Q J, Zhou Z L, et al. A high sensitivity gas sensor for formaldehyde based on CdO and In2O3 doped nanocrystalline SnO2. Nanotechnology, 2008, 19(9):095506 doi: 10.1088/0957-4484/19/9/095506
[18]
Dakhel A A. Influence of dysprosium doping on the electrical and optical properties of CdO thin films. Sol Energy, 2009, 83(6):934 doi: 10.1016/j.solener.2008.12.015
[19]
Zhao Z, Morel D L, Ferekides C S. Electrical and optical properties of tin-doped CdO films deposited by atmospheric metalorganic chemical vapor deposition. Thin Solid Films, 2002, 413(1/2):203
[20]
Igasaki Y, Kanma H. Argon gas pressure dependence of the properties of transparent conducting ZnO:Al films deposited on glass substrates. Appl Surf Sci, 2001, 169-170(0):508
[21]
Schroder D K. Semiconductor material and device characterization. New York: John Wiley and Sons, 1990
[22]
Fan X M, Lian J S, Guo Z X, et al. Microstructure and photoluminescence properties of ZnO thin films grown by PLD on Si substrates. Appl Surf Sci, 2005, 239(2):176 doi: 10.1016/j.apsusc.2004.05.144
[23]
Zhu B L, Sun X H, Zhao X Z, et al. The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition. Vacuum, 2008, 82(5):495 doi: 10.1016/j.vacuum.2007.07.059
[24]
Aktaruzzaman A F, Sharma G L, Malhotra L K. Electrical, optical and annealing characteristics of ZnO:Al films prepared by spray pyrolysis. Thin Solid Films, 1991, 198:67 doi: 10.1016/0040-6090(91)90325-R
[25]
Parthiban S, Elangovan E, Ramamurthi K, et al. Investigations on high visible to near infrared transparent and high mobility Mo doped In2O3 thin films prepared by spray pyrolysis technique. Sol Energy Mater Sol Cells, 2010, 94(3):406 doi: 10.1016/j.solmat.2009.10.017
[26]
Shinde V R, Gujar T P, Lokhande C D, et al. Mn doped and undoped ZnO films:a comparative structural, optical and electrical properties study. Mater Chem Phys, 2006, 96(2/3):326
[27]
Burstein E. Anomalous optical absorption limit in InSb. Phys Rev, 1954, 93:632 doi: 10.1103/PhysRev.93.632
[28]
Moss T S. The interpretation of the properties of indium antimonide. Proc Phys Soc Lond B, 1954, 67:775 doi: 10.1088/0370-1301/67/10/306
[29]
Gurumurugan K, Mangalaraj D, Narayandass S K, et al. Structural, optical, and electrical properties of cadmium oxide films deposited by spray pyrolysis. Phys Status Solidi A, 1994, 143:85 doi: 10.1002/(ISSN)1521-396X
[30]
Chu T L, Chu S S. Degenerate cadmium oxide films for electronic devices. J Electron Mater, 1990, 19:1003 doi: 10.1007/BF02652928
[31]
Gurumurugan K, Mangalaraj D, Narayandass S K. Magnetron-sputtered transparent conducting CdO thin-films. J Electron Mater, 1996, 25:765 doi: 10.1007/BF02666538

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2033 Times PDF downloads: 15 Times Cited by: 0 Times

    History

    Received: 12 September 2012 Revised: 21 October 2012 Online: Published: 01 May 2013

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2013  >  34(5): 053003
      Biju Zheng, Wen Hu. Influence of substrate temperature on the structural and properties of In-doped CdO films prepared by PLD[J]. Journal of Semiconductors, 2013, 34(5): 053003. doi: 10.1088/1674-4926/34/5/053003 B J Zheng, W Hu. Influence of substrate temperature on the structural and properties of In-doped CdO films prepared by PLD[J]. J. Semicond., 2013, 34(5): 053003. doi: 10.1088/1674-4926/34/5/053003.Export: BibTex EndNote
      Citation:
      Biju Zheng, Wen Hu. Influence of substrate temperature on the structural and properties of In-doped CdO films prepared by PLD[J]. Journal of Semiconductors, 2013, 34(5): 053003. doi: 10.1088/1674-4926/34/5/053003

      B J Zheng, W Hu. Influence of substrate temperature on the structural and properties of In-doped CdO films prepared by PLD[J]. J. Semicond., 2013, 34(5): 053003. doi: 10.1088/1674-4926/34/5/053003.
      Export: BibTex EndNote
      shu

      Influence of substrate temperature on the structural and properties of In-doped CdO films prepared by PLD

      doi: 10.1088/1674-4926/34/5/053003

      • Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming 650093, China

      Funds:

      the Yunnan Provincial Natural of Science Foundation of China KKSY201251089

      Project supported by the Yunnan Provincial Natural of Science Foundation of China (No. KKSY201251089)

      More Information
      • Corresponding author: Zheng Biju, Email:zhengbiju@gmail.com
      • Received Date: 2012-09-12
      • Revised Date: 2012-10-21
      • Published Date: 2013-05-01

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return