Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method

Li Rengang; Huang Qing'an; Li Weihua

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Li Rengang, Huang Qing'an, Li Weihua. Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method[J]. Journal of Semiconductors, 2006, In Press. Li R G, Huang Q, Li W H. Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method[J]. Chin. J. Semicond., 2006, 27(10): 1880.Export: BibTex EndNote

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Li Rengang, Huang Qing'an, Li Weihua. Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method[J]. Journal of Semiconductors, 2006, In Press.

Li R G, Huang Q, Li W H. Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method[J]. Chin. J. Semicond., 2006, 27(10): 1880.

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Li R G, Huang Q, Li W H. Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method[J]. Chin. J. Semicond., 2006, 27(10): 1880.

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Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method

Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China
Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China
Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

Received Date: 2015-08-18
Accepted Date: 2006-03-09
Revised Date: 2006-04-13
Published Date: 2006-10-12

Abstract

Abstract

This paper develops a nodal analysis model of in-plane electrothermal microactuators with the Galerkin method based on the weighted residue method.With high accuracy,easy modeling,and clear configuration,the model makes it possible to co-simulate with the control circuit,which means it can simulate the whole system with the electrothermal microactuators.The model is verified by simulation with ANSYS and agrees well with it.
- :relativity,
- weighted residue method,
- nodal analysis method,
- electrothermal microactuator

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