| Citation: |
Li Sihua, Liu Yufei, Gao Xiang, Wu Yaming. Analysis and Fabrication of Torsion Micromirror ActuatorsBased on a MEMS Technology[J]. Journal of Semiconductors, 2006, In Press.
Li S H, Liu Y F, Gao X, Wu Y M. Analysis and Fabrication of Torsion Micromirror ActuatorsBased on a MEMS Technology[J]. Chin. J. Semicond., 2006, 27(4): 756.
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Analysis and Fabrication of Torsion Micromirror ActuatorsBased on a MEMS Technology
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Abstract
Based on micro-electro-mechanical systems,a novel method employing bonding and wafer thinning technologies is proposed and demonstrated to fabricate torsion micromirror actuators with dimensions of 600μm×700μm.The experimental results show that a tilt angle of about 0.3. is achieved under a driving voltage of 18V with a resonator frequency over 1kHz.-
Keywords:
- MEMS,
- torsion micromirror,
- actuator,
- bonding and wafer thinning
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References
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Proportional views
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