Chin. J. Semicond. > 2004, Volume 25 > Issue 1 > 87-92
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绝缘膜负带电时的表面局部电场与二次电子返回特性

冯仁剑 , 张海波 , 王顺勇 and Katsumi URA

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Key words: 扫描电镜, 图像衬度, 绝缘膜, 负带电, 二次电子, Monte Carlo模拟, 集成电路测试

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(1): 87-92
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      • Received Date: 2015-08-19

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