| Citation: |
Wang Xiaohong, Xie Kewen, Zhou Jun, Liu Litian. Design of JPEMFC Fabricated with Porous Silicon[J]. Journal of Semiconductors, 2003, In Press.
Wang X H, Xie K W, Zhou J, Liu L T. Design of JPEMFC Fabricated with Porous Silicon[J]. Chin. J. Semicond., 2003, 24(S1): 198.
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Design of JPEMFC Fabricated with Porous Silicon
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Abstract
A novel material porous silicon is used as diffusion layer in pPEMFC (micro proton eXchange membrane fuel cells) for its loose and porous structure and compatibility with IC process. Study of the formation of porous silicon and metal sputter deposition on the porous silicon is performed. A fabrication process of pPEMFC based on the technology of MEMS and film deposition is presented.-
Keywords:
- μPEMFC,
- porous silicon,
- MEMS
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References
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Proportional views
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