Chin. J. Semicond. > 2006, Volume 27 > Issue S1 > 343-346
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Fabrication of 8×8 MEMS Optical Switch Array

Jia Cuiping, Dong Wei, Zhou Jingran, Liu Caixia, Zang Huidong, Xuan Wei, Xu Baokun and Chen Weiyou

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Abstract: Torsion beam 8×8 optical switch array driven by electrostatic,including upper and under electrodes,was fabricated by MEMES technique.According to crystal characteristics of (110) silicon and anisotropic etching in KOH solution,8×8 micro-mirror array was fabricated.Moreover,the structure of optical switches is rectified by a consideration of undercut when micro-mirrors are etched.The Slant electrode was fabricated in tilting (111) silicon.The whole fabrication technology is characterized by simple technique and low cost.Life time is about 1E7 cycles and tested switch time is less than 10ms.

Key words: optical switches, (110) silicon, micro-mirror, switch time

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2006

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      Article Navigation >  Journal of Semiconductors  > 2006  >  27(S1): 343-346
      Jia Cuiping, Dong Wei, Zhou Jingran, Liu Caixia, Zang Huidong, Xuan Wei, Xu Baokun, Chen Weiyou. Fabrication of 8×8 MEMS Optical Switch Array[J]. Journal of Semiconductors, 2006, In Press. Jia C P, Dong W, Zhou J R, Liu C X, Zang H D, Xuan W, Xu B K, Chen W Y. Fabrication of 8×8 MEMS Optical Switch Array[J]. Chin. J. Semicond., 2006, 27(13): 343.Export: BibTex EndNote
      Citation:
      Jia Cuiping, Dong Wei, Zhou Jingran, Liu Caixia, Zang Huidong, Xuan Wei, Xu Baokun, Chen Weiyou. Fabrication of 8×8 MEMS Optical Switch Array[J]. Journal of Semiconductors, 2006, In Press.

      Jia C P, Dong W, Zhou J R, Liu C X, Zang H D, Xuan W, Xu B K, Chen W Y. Fabrication of 8×8 MEMS Optical Switch Array[J]. Chin. J. Semicond., 2006, 27(13): 343.
      Export: BibTex EndNote
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      Fabrication of 8×8 MEMS Optical Switch Array

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sc

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

      • Received Date: 2015-08-20

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