Chin. J. Semicond. > 2000, Volume 21 > Issue 9 > 857-861

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Novel Oxide Trap Behavior in Ultra Thin Gate and Its Study by PDO Method

王子欧 , 毛凌峰 , 卫建林 , 许铭真 and 谭长华

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Key words: Ultra Thin Gate

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    History

    Received: 20 August 2015 Revised: Online: Published: 01 September 2000

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      • Received Date: 2015-08-20

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