Chin. J. Semicond. > 2001, Volume 22 > Issue 11 > 1429-1433

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Key words: 半导体性锰硅化物, 硅单晶, 质量分析的低能离子束

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    Received: 20 August 2015 Revised: Online: Published: 01 November 2001

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      • Received Date: 2015-08-20

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