| Citation: |
Wu Xuming, Wang Xiaodong, He Guorong, Wang Qing, Cao Yulian, Tan Manqing. Design and Analysis of a Long Wavelength MOEMS Tunable Filter[J]. Journal of Semiconductors, 2007, In Press.
Wu X M, Wang X D, He G R, Wang Q, Cao Y L, Tan M Q. Design and Analysis of a Long Wavelength MOEMS Tunable Filter[J]. Chin. J. Semicond., 2007, 28(1): 117.
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Design and Analysis of a Long Wavelength MOEMS Tunable Filter
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Abstract
A novel MOEMS tunable filter is proposed. We choose GaAs/AlGaAs as the bottom distributed Bragg reflector (DBR),GaAs and SiO2/Si as the top DBR,and air as the cavity. Parameters of the device,such as the FWHM,transmittance,tuning deflection,and tuning velocity,are analyzed theoretically according to the demand of the WDM system. The influences of the depth h,width b,and length L on tuning deflection and tuning velocity are investigated in detail. The tuning deflection increases with the increase of L and decreases with the increase of h and b,while the tuning velocity behaves in the opposite way. -
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