SEMICONDUCTOR DEVICES

Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber

Song Feng1, 2, and Yong Gao1, 2

+ Author Affiliations

 Corresponding author: Feng Song, Email:vonfengs@163.com

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Abstract: Based on a submicrometer-sized SiGe-SOI waveguide, the coupling loss mechanism is analyzed between the submicrometer-sized SiGe-SOI waveguide and the fiber. The main sources of coupling loss are analyzed, and the mismatch loss of the mode field is the mainly lost during connection between the submicrometer-sized waveguide and the fiber. In order to reduce the mismatch loss of the mode field, the structure of a nanotaper SiGe-SOI waveguide with a nanometer-sized tip is adopted. By reducing the waveguide dimensions to increase the mode field size, coupling loss could be reduced between the waveguide and the fiber. Different mode field dimensions of nanotaper SiGe-SOI waveguides and fiber are quantitatively analyzed, and the quantitative relationship between nanotaper SiGe-SOI waveguide dimensions and mode field dimensions are obtained. Finally, nanotaper SiGe-SOI waveguides are made, and the test and analysis have been done. The final experimental results accord well with the theoretical analysis. When the waveguide width is 0.5 μm, the minimum coupling loss of the SiGe-SOI waveguide is 0.56 dB/facet, and also the correctness of the design method and theoretical analysis are verified.

Key words: optical devicesnanotaperSiGe-SOI waveguidemode fieldcoupling loss



[1]
Yu Jinzhong, Wei Hongzhen, Yan Qingfeng, et al. Integrated MMI optical couplers and optical switches in silicon-on-insulator technology. Journal of the Graduate School of The Chinese Academy of Sciences, 2003, 20(1): 1 http://www.irgrid.ac.cn/handle/1471x/105007?mode=full
[2]
Yu J Z, Huang C J, Cheng B W, et al. Type-Ⅱ SiGe/Si MQWs (multi-quantum wells) and self-organized Ge/Si islands grown by UHV/CVD system. International J Modern Phys, 2002, 16(28&29): 4228 http://www.irgrid.ac.cn/handle/1471x/64823?mode=full&submit_simple=Show+full+item+record
[3]
Yu Jinzhong, Yu Zhou, Cheng Buwen, et al. GeSi/Si heterostructures grown by a home-made UHV/CVD. Science Foundation in China, 1999, 7(7): 40
[4]
Nishi H, Tsuchizawa T, Shinojima H. Low-polarization-dependent silica waveguide monolithically integrated on SOI photonic platform. J Lightwave Technol, 2013, 31(11): 1821 doi: 10.1109/JLT.2013.2256880
[5]
Baghsiahi H, Wang K, Kandulski W. Optical waveguide end facet roughness and optical coupling loss. J Lightwave Technol, 2013, 31(16): 2659 doi: 10.1109/JLT.2013.2271952
[6]
Moerman I, van Daele P P, Demeester P M. A review on fabrication technologies for the monolithic integration of tapers with Ⅲ-Ⅴ semiconductor devices. IEEE J Sel Top Quantum Electron, 1997, 3: 1308 doi: 10.1109/2944.658785
[7]
Kasaya K, Mitomi O, Naganuma M, et al. A simple laterally tapered waveguide for low-loss coupling to single-mode fibers. IEEE Photonics Technol Lett, 1993, 5: 345 doi: 10.1109/68.205633
[8]
Van Laere F, Roelkens G, Ayre M, et al. Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides. J Lightwave Technol, 2007, 25: 151 doi: 10.1109/JLT.2006.888164
[9]
Tang Y B, Dai D X, He S L. Proposal for a grating waveguide serving as both a polarization splitter and an efficient coupler for silicon-on-insulator nanophotonic circuits. IEEE Photonics Technol Lett, 2009, 21: 242 doi: 10.1109/LPT.2008.2010528
[10]
Fritzs M, Knecht J, Bozier C, et al. Fabrication of three-dimension mode converters for silicon-based integrated optics. J Vac Sci Technol B, 2003, B21: 2897
[11]
Sure A, Dillon T, Murakowski J, et al. Fabrication and characterization of three-dimensional silicon tapers. Opt Express, 2003, 11: 3555 doi: 10.1364/OE.11.003555
[12]
Almeida V R, Panepucci R R, Lipson M. Nanotaper for compact mode conversion. Opt Lett, 2003, 28: 1302 doi: 10.1364/OL.28.001302
[13]
Eldada L, Yardley J T. Modal analysis for optimization of single-mode waveguide pigtailing and fiber splicing. Appl Opt, 1998, 37: 7747 doi: 10.1364/AO.37.007747
[14]
Yaffe H H, Henry C H, Kazarinov R F, et al. Polarization independent silica-on-silicon Mach-Zehnder interferometers. J Lightwave Technol, 1994, 12: 64 doi: 10.1109/50.265737
[15]
Wörhoff K, Offrein B J, Lambeck P V, et al. Birefringence compensation applying double-core waveguiding structures. IEEE Photonics Technol Lett, 1999, 11: 206 doi: 10.1109/68.740705
[16]
Gao Yong, Feng Song, Yang Yuan. Research on the propagation mechanism and loss of ridged SiGe-OI optical waveguide. The 9th International Conference on Solid-State and Integrated-Circuit Technology, 2008
[17]
Feng Song, Gao Yong, Yang Yuan. Mode analysis and structure parameters optimization of a novel SiGe-OI rib optical waveguides. Journal of Semiconductors, 2009, 30(8): 084008 doi: 10.1088/1674-4926/30/8/084008
[18]
Presby H M, Edwards C A. Near 100% efficient fiber microlenses. Electron Lett, 1992, 28: 582 doi: 10.1049/el:19920367
[19]
Fig. 1.  The coupling structure of a nanotaper.

Fig. 2.  (a) The structure schematic diagram and (b) mode field distribution of rib waveguide.

Fig. 3.  Mode field profile of (a) general fiber and (b) tapered fiber.

Fig. 4.  Mode field profiles of SiGe-SOI rib waveguides at different waveguide widths.

Fig. 5.  Relationship of mode field width at different waveguide widths.

Fig. 6.  (a) The coupling between nanotaper SiGe-SOI waveguide and optical fiber. (b) The simulation of nanotaper waveguide coupling system.

Fig. 7.  The flow chart of SiGe-SOI waveguide.

Fig. 8.  SEM of nanotaper SiGe-SOI waveguide.

Table 1.   Structure parameters of sub-micrometer-sized SiGe-SOI waveguide.

Table 2.   The test value of coupling loss at 1.55 μm.

[1]
Yu Jinzhong, Wei Hongzhen, Yan Qingfeng, et al. Integrated MMI optical couplers and optical switches in silicon-on-insulator technology. Journal of the Graduate School of The Chinese Academy of Sciences, 2003, 20(1): 1 http://www.irgrid.ac.cn/handle/1471x/105007?mode=full
[2]
Yu J Z, Huang C J, Cheng B W, et al. Type-Ⅱ SiGe/Si MQWs (multi-quantum wells) and self-organized Ge/Si islands grown by UHV/CVD system. International J Modern Phys, 2002, 16(28&29): 4228 http://www.irgrid.ac.cn/handle/1471x/64823?mode=full&submit_simple=Show+full+item+record
[3]
Yu Jinzhong, Yu Zhou, Cheng Buwen, et al. GeSi/Si heterostructures grown by a home-made UHV/CVD. Science Foundation in China, 1999, 7(7): 40
[4]
Nishi H, Tsuchizawa T, Shinojima H. Low-polarization-dependent silica waveguide monolithically integrated on SOI photonic platform. J Lightwave Technol, 2013, 31(11): 1821 doi: 10.1109/JLT.2013.2256880
[5]
Baghsiahi H, Wang K, Kandulski W. Optical waveguide end facet roughness and optical coupling loss. J Lightwave Technol, 2013, 31(16): 2659 doi: 10.1109/JLT.2013.2271952
[6]
Moerman I, van Daele P P, Demeester P M. A review on fabrication technologies for the monolithic integration of tapers with Ⅲ-Ⅴ semiconductor devices. IEEE J Sel Top Quantum Electron, 1997, 3: 1308 doi: 10.1109/2944.658785
[7]
Kasaya K, Mitomi O, Naganuma M, et al. A simple laterally tapered waveguide for low-loss coupling to single-mode fibers. IEEE Photonics Technol Lett, 1993, 5: 345 doi: 10.1109/68.205633
[8]
Van Laere F, Roelkens G, Ayre M, et al. Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides. J Lightwave Technol, 2007, 25: 151 doi: 10.1109/JLT.2006.888164
[9]
Tang Y B, Dai D X, He S L. Proposal for a grating waveguide serving as both a polarization splitter and an efficient coupler for silicon-on-insulator nanophotonic circuits. IEEE Photonics Technol Lett, 2009, 21: 242 doi: 10.1109/LPT.2008.2010528
[10]
Fritzs M, Knecht J, Bozier C, et al. Fabrication of three-dimension mode converters for silicon-based integrated optics. J Vac Sci Technol B, 2003, B21: 2897
[11]
Sure A, Dillon T, Murakowski J, et al. Fabrication and characterization of three-dimensional silicon tapers. Opt Express, 2003, 11: 3555 doi: 10.1364/OE.11.003555
[12]
Almeida V R, Panepucci R R, Lipson M. Nanotaper for compact mode conversion. Opt Lett, 2003, 28: 1302 doi: 10.1364/OL.28.001302
[13]
Eldada L, Yardley J T. Modal analysis for optimization of single-mode waveguide pigtailing and fiber splicing. Appl Opt, 1998, 37: 7747 doi: 10.1364/AO.37.007747
[14]
Yaffe H H, Henry C H, Kazarinov R F, et al. Polarization independent silica-on-silicon Mach-Zehnder interferometers. J Lightwave Technol, 1994, 12: 64 doi: 10.1109/50.265737
[15]
Wörhoff K, Offrein B J, Lambeck P V, et al. Birefringence compensation applying double-core waveguiding structures. IEEE Photonics Technol Lett, 1999, 11: 206 doi: 10.1109/68.740705
[16]
Gao Yong, Feng Song, Yang Yuan. Research on the propagation mechanism and loss of ridged SiGe-OI optical waveguide. The 9th International Conference on Solid-State and Integrated-Circuit Technology, 2008
[17]
Feng Song, Gao Yong, Yang Yuan. Mode analysis and structure parameters optimization of a novel SiGe-OI rib optical waveguides. Journal of Semiconductors, 2009, 30(8): 084008 doi: 10.1088/1674-4926/30/8/084008
[18]
Presby H M, Edwards C A. Near 100% efficient fiber microlenses. Electron Lett, 1992, 28: 582 doi: 10.1049/el:19920367
[19]
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    Received: 06 January 2014 Revised: 09 April 2014 Online: Published: 01 July 2014

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      Song Feng, Yong Gao. Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber[J]. Journal of Semiconductors, 2014, 35(7): 074010. doi: 10.1088/1674-4926/35/7/074010 S Feng, Y Gao. Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber[J]. J. Semicond., 2014, 35(7): 074010. doi: 10.1088/1674-4926/35/7/074010.Export: BibTex EndNote
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      Song Feng, Yong Gao. Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber[J]. Journal of Semiconductors, 2014, 35(7): 074010. doi: 10.1088/1674-4926/35/7/074010

      S Feng, Y Gao. Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber[J]. J. Semicond., 2014, 35(7): 074010. doi: 10.1088/1674-4926/35/7/074010.
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      Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber

      doi: 10.1088/1674-4926/35/7/074010
      Funds:

      the Shaanxi Province Ordinary University Key Disciplines Construction Projects of Special Funds (2008)169

      Project supported by the National Natural Science Foundation of China (No. 61204080), the Natural Science Foundation of Shaanxi Province (No. 2012JM1011), the Shaanxi Provincial Education Department (No. 2013JK1111), the Doctoral Program Foundation of Xi'an Polytechnic University of China (No. BS1128), and the Shaanxi Province Ordinary University Key Disciplines Construction Projects of Special Funds (No. (2008)169)

      the Doctoral Program Foundation of Xi'an Polytechnic University of China BS1128

      the National Natural Science Foundation of China 61204080

      the Shaanxi Provincial Education Department 2013JK1111

      the Natural Science Foundation of Shaanxi Province 2012JM1011

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      • Corresponding author: Feng Song, Email:vonfengs@163.com
      • Received Date: 2014-01-06
      • Revised Date: 2014-04-09
      • Published Date: 2014-07-01

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