| Citation: |
Yang Hua, Zhu Hongliang, Xie Hongyun, Zhao Lingjuan, Zhou Fan, Wang Wei. Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate[J]. Journal of Semiconductors, 2006, In Press.
Yang H, Zhu H L, Xie H Y, Zhao L J, Zhou F, Wang W. Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate[J]. Chin. J. Semicond., 2006, 27(1): 1.
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Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate
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Abstract
Three kinds of coplanar waveguides (CPWs) are designed and fabricated on different silicon substrates--common low-resistivity silicon substrate (LRS),LRS with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon (HRS) substrate.The results show that the microwave loss of a CPW on LRS is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the CPW transmission lines and the LRS.A CPW directly on HRS shows a loss lower than 2dB/cm in the range of 0～26GHz and the process is simple,so HRS is a more suitable CPW substrate. -
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