| Citation: |
Chen Rui, Lin Guijiang, Chen Songyan, Li Cheng, Lai Hongkai, Yu Jinzhong. Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser[J]. Journal of Semiconductors, 2008, In Press.
Chen R, Lin G J, Chen S Y, Li C, Lai H K, Yu J Z. Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser[J]. J. Semicond., 2008, 29(5): 893.
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Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser
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Abstract
The waveguide design is one of the most important parts in a terahertz quantum cascade laser(QCL).Si/SiGe QCL waveguides,based on the Drude model and finite-difference time-domain (FDTD) method,are designed by the traditional refractive index waveguide structure,the single-sided metal structure,the double-metal clad structure,and a novel metal/metal silicide structure.The metal/metal silicide structure,showing high modal confinement,is convenient in process engineering and is expected to be a viable waveguide solution for Si/SiGe QCLs in the THz range.-
Keywords:
- terahertz,
- Si/SiGe,
- quantum cascade laser,
- waveguide
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References
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