| Citation: |
Shen Guangping, Wu Jian, Zhang Hua, Qin Ming, Huang Qing’an. Design of a 2D Thermal Wind Sensor Based on MEMS Process[J]. Journal of Semiconductors, 2007, In Press.
Shen G, Wu J, Zhang H, Qin M, Huang Q. Design of a 2D Thermal Wind Sensor Based on MEMS Process[J]. Chin. J. Semicond., 2007, 28(11): 1830.
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Design of a 2D Thermal Wind Sensor Based on MEMS Process
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Abstract
The design,fabrication,and test results of a 2D thermal wind sensor are presented.The wind sensor measures wind speed and direction by calorimetric principle in constant power mode.Heater and detector resistors are fabricated on glass substrate using a lift-off process.The fabrication is simple and reliable,and good thermal isolation and high sensitivity are achieved.The sensor can detect wind speed in the range of 10m/s and flow direction over 360° with an error of less than 8°.The response time of the sensor is less than 1s,and the heat power is 10mW.-
Keywords:
- MEMS,
- lift-off process,
- wind speed,
- wind direction,
- flow sensor
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References
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