Chin. J. Semicond. > 2006, Volume 27 > Issue 1 > 82-85

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Influence of Annealing Temperature on Luminescence of β-FeSi2 Particles Embedded in Silicon

Li Cheng, Lai Hongkai and Chen Songyan

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Abstract: The influence of annealing temperature on the luminescence and electrical properties of β-FeSi2 particles embedded in silicon is investigated.The experimental results indicate that annealing at 900℃ improves the particles’ crystal quality,but dislocations are introduced in the silicon due to the thermal and lattice mismatches,which broaden the photoluminescence spectrum and enlarge the leakage current.Stronger room temperature electroluminescence is obtained from the sample annealed at 800℃.

Key words: β-FeSi2photoluminescencethermal annealing temperature

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    Received: 20 August 2015 Revised: Online: Published: 01 January 2006

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      Li Cheng, Lai Hongkai, Chen Songyan. Influence of Annealing Temperature on Luminescence of β-FeSi2 Particles Embedded in Silicon[J]. Journal of Semiconductors, 2006, In Press. Li C, Lai H K, Chen S Y. Influence of Annealing Temperature on Luminescence of β-FeSi2 Particles Embedded in Silicon[J]. Chin. J. Semicond., 2006, 27(1): 82.Export: BibTex EndNote
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      Li Cheng, Lai Hongkai, Chen Songyan. Influence of Annealing Temperature on Luminescence of β-FeSi2 Particles Embedded in Silicon[J]. Journal of Semiconductors, 2006, In Press.

      Li C, Lai H K, Chen S Y. Influence of Annealing Temperature on Luminescence of β-FeSi2 Particles Embedded in Silicon[J]. Chin. J. Semicond., 2006, 27(1): 82.
      Export: BibTex EndNote

      Influence of Annealing Temperature on Luminescence of β-FeSi2 Particles Embedded in Silicon

      • Received Date: 2015-08-20

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