Chin. J. Semicond. > 2002, Volume 23 > Issue 12 > 1238-1244

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GaN在Si(001)上的ECR等离子体增强MOCVD直接生长研究(英文)

徐茵 , 顾彪 , 秦福文 , 李晓娜 and 王三胜

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Key words: PEMOCVD, GaN/Si(001)界面, 晶相结构

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    History

    Received: 19 August 2015 Revised: Online: Published: 01 December 2002

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      • Received Date: 2015-08-19

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