| Citation: |
Jiang Zheng, Ding Guifu, Wang Yan, Zhang Dongmei, Wang Zhiming, Feng Jianzhi. A Teeterboard Pattern MEMS Permanent Magnet Bistable Structure Supported by Torsion and Cantilever Beam[J]. Journal of Semiconductors, 2006, In Press.
Jiang Z, Ding G F, Wang Y, Zhang D M, Wang Z M, Feng J Z. A Teeterboard Pattern MEMS Permanent Magnet Bistable Structure Supported by Torsion and Cantilever Beam[J]. Chin. J. Semicond., 2006, 27(1): 143.
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A Teeterboard Pattern MEMS Permanent Magnet Bistable Structure Supported by Torsion and Cantilever Beam
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Abstract
After feasibility analysis and parameter optimization,a teeterboard pattern MEMS permanent magnet bistable structure supported by a torsion and cantilever beam is fabricated with sacrificial layer technology of non-silicon surface micro fabrication.The size of the bistable structure is 1.9mm×1.6mm×0.03mm.The stable states can be maintained without power consumption by a permanent magnet force,and the two states are switched by applying a perpendicular driving force on one side of the anchors to achieve a perpendicular displacement of 30μm.The driving moment can be adjusted by controlling the sizes of the permanent magnet,torsion,and the cantilever beam.With electromagnetic,electrothermal,and electrostatic micro actuators,this bistable structure can be applied to permanent magnet bistable MEMS relay.-
Keywords:
- permanent magnet,
- bistable,
- MEMS,
- micro relay
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References
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Proportional views
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