Fig. 1.
The principle of MEMS gyroscope interface circuit.
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Qiang Fu, Xipeng Di, Liang Yin, Xiaowei Liu. A low noise interface circuit design of micro-machined gyroscope[J]. Journal of Semiconductors, 2017, 38(7): 075005. doi: 10.1088/1674-4926/38/7/075005
Q Fu, X P Di, L Yin, X W Liu. A low noise interface circuit design of micro-machined gyroscope[J]. J. Semicond., 2017, 38(7): 075005. doi: 10.1088/1674-4926/38/7/075005.
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A low noise interface circuit design of micro-machined gyroscope
doi: 10.1088/1674-4926/38/7/075005
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Abstract
The analyses of MEMS gyroscope interface circuit on thermal noise, 1/f noise and phase noise are made in this paper. A closed-loop differential driving circuit and a low-noise differential detecting circuit based on the high frequency modulation are designed to limit the noise. The interface chip is implemented in a standard 0.5 μ m CMOS process. The test results show that the resolution of sensitive capacity can reach to 6.47 × 10-20 F at the bandwidth of 60 Hz. The measuring range is ± 200°/s and the nonlinearity is 310 ppm. The output noise density is 5.8°/(h·$\sqrt {\rm{Hz}}$). The angular random walk (allen-variance) is 0.092°/$\sqrt {\rm{h}}$ and the bias instability is 2.63°/h.-
Keywords:
- gyroscope,
- low noise,
- interface circuit
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References
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