Citation: |
Bulk-Silicon Resonant Accelerometer[J]. Journal of Semiconductors, 2005, In Press.
Bulk-Silicon Resonant Accelerometer[J]. Chin. J. Semicond., 2005, 26(2): 281.
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Bulk-Silicon Resonant Accelerometer
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Abstract
Resonant accelerometer is designed,which includes two doubleended tuning forks,a proof mass,fourleverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27.3Hz/g,and the resolution is 167.8μg. -
References
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