Chin. J. Semicond. > 2005, Volume 26 > Issue 2 > 281-286

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Abstract: Resonant accelerometer is designed,which includes two doubleended tuning forks,a proof mass,fourleverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27.3Hz/g,and the resolution is 167.8μg.

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2005

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      Bulk-Silicon Resonant Accelerometer[J]. Journal of Semiconductors, 2005, In Press. Bulk-Silicon Resonant Accelerometer[J]. Chin. J. Semicond., 2005, 26(2): 281.Export: BibTex EndNote
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      Bulk-Silicon Resonant Accelerometer[J]. Journal of Semiconductors, 2005, In Press.

      Bulk-Silicon Resonant Accelerometer[J]. Chin. J. Semicond., 2005, 26(2): 281.
      Export: BibTex EndNote

      Bulk-Silicon Resonant Accelerometer

      • Received Date: 2015-08-19

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