Chin. J. Semicond. > 2004, Volume 25 > Issue 10 > 1324-1330

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SOI热光开关调制区结构与速度和功耗关系的有限元法分析

刘敬伟 , 王小龙 , 陈少武 and 余金中

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Key words: 有限元法, SOI热光开关, 开关速度, 功耗

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2004

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      • Received Date: 2015-08-19

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