| Citation: |
Xu Fujun, Shen Bo, Wang Maojun, Xu jian, Miao Zhenlin, Yang Zhijian, Qin Zhixin, Zhang Guoyi, Lin Bing, Bai Shulin. Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition[J]. Journal of Semiconductors, 2007, In Press.
Xu F J, Shen B, Wang M J, Xu J, Miao Z L, Yang Z J, Qin Z X, Zhang G Y, Lin B, Bai S L. Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition[J]. Chin. J. Semicond., 2007, 28(10): 1551.
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Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition
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Abstract
The elastic-plastic mechanical properties of AlxGa1-xN thin films with high Al composition are investigated by the nano-indentation technique.It is found that the Young’s modulus E of the films and the shear stress to produce the plastic deformation in AlxGa1-xN films increase with increasing Al composition,while the occurrence of the clear and sudden displacement discontinuity ( "pop-in" ) in the plastic deformation (PD) process decreases.With increasing Al composition,it is believed that the increase of the bond strength and the decrease of the stress due to the lesser lattice mismatch between AlxGa1-xN films and AlN/sapphire templates result in more resistance to the formation of dislocations,which is responsible for the "pop-in" behavior in AlxGa1-xN films.-
Keywords:
- AlxGa1-xN,
- Young’s modulus,
- mechanical properties,
- plastic deformation
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References
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