Chin. J. Semicond. > 2004, Volume 25 > Issue 7 > 858-862
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SiON对Si基SiO_2AWG偏振补偿的数值分析

安俊明 , 郜定山 , 李健 , 李建光 , 王红杰 and 胡雄伟

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Key words: SiON薄膜, Si基SiO2波导, 应力, 双折射, 阵列波导光栅, 偏振补偿

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    Received: 19 August 2015 Revised: Online: Published: 01 July 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(7): 858-862
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      • Received Date: 2015-08-19

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