Chin. J. Semicond. > 1995, Volume 16 > Issue 12 > 921-927

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硅微结构加速度传感器空气阻尼的研究

陈宏,鲍敏杭

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1995

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      • Received Date: 2015-08-19

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