Chin. J. Semicond. > 2005, Volume 26 > Issue 11 > 2218-2222

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Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band

Zuo Yuhua, Cai Xiao, Mao Rongwei and Wang Qiming

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Abstract: Based on a step-type F-P cavity structure,a novel all Si-based thermo-optical tunable flat-top filter with narrow band is fabricated,using our patent SOR(silicon-on-reflector) bonding technology.The device demonstrates a flat-top width of 2nm,3dB band of 4.4nm,FSR(free spectra range) of 8.5nm,and a red-shift of the transmittance peak of 33nm under the applied voltage.

Key words: flat-top filterthermo-optical tunabilitySi-basenarrow band

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    Received: 19 August 2015 Revised: Online: Published: 01 November 2005

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      Zuo Yuhua, Cai Xiao, Mao Rongwei, Wang Qiming. Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band[J]. Journal of Semiconductors, 2005, In Press. Zuo Y H, Cai X, Mao R W, Wang Q M. Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band[J]. Chin. J. Semicond., 2005, 26(11): 2218.Export: BibTex EndNote
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      Zuo Yuhua, Cai Xiao, Mao Rongwei, Wang Qiming. Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band[J]. Journal of Semiconductors, 2005, In Press.

      Zuo Y H, Cai X, Mao R W, Wang Q M. Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band[J]. Chin. J. Semicond., 2005, 26(11): 2218.
      Export: BibTex EndNote

      Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band

      • Received Date: 2015-08-19

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