Abstract: Space ordered 1.3μm self-assembled InAs QDs are grown on GaAs(100) vicinal substrates by MOCVD.Photoluminescence measurements show that the dots on vicinal substrates have a much higher PL intensity and a narrower FWHM than those of dots on exact substrates, which indicates better material quality.To obtain 1.3μm emissions of InAs QDs,the role of the so called InGaAs strain cap layer (SCL) and the strain buffer layer (SBL) in the strain relaxation process in quantum dots is studied.While the use of SBL results only in a small change of emission wavelength,SCL can extend the QD’s emission over 1.3μm due to the effective strain reducing effect of SCL.

Key words: InAs, quantum dots, MOCVD