Fig. 1.
(Color online) Schematic of a vertical hot-wall mist-CVD.
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Xiaojie Wang, Wenxiang Mu, Jiahui Xie, Jinteng Zhang, Yang Li, Zhitai Jia, Xutang Tao. Rapid epitaxy of 2-inch and high-quality α-Ga2O3 films by mist-CVD method[J]. Journal of Semiconductors, 2023, 44(6): 062803. doi: 10.1088/1674-4926/44/6/062803
X J Wang, W X Mu, J H Xie, J T Zhang, Y Li, Z T Jia, X T Tao. Rapid epitaxy of 2-inch and high-quality α-Ga2O3 films by mist-CVD method[J]. J. Semicond, 2023, 44(6): 062803. doi: 10.1088/1674-4926/44/6/062803
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Rapid epitaxy of 2-inch and high-quality α-Ga2O3 films by mist-CVD method
doi: 10.1088/1674-4926/44/6/062803
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Abstract
High thickness uniformity and large-scale films of α-Ga2O3 are crucial factors for the development of power devices. In this work, a high-quality 2-inch α-Ga2O3 epitaxial film on c-plane sapphire substrates was prepared by the mist-CVD method. The growth rate and phase control mechanisms were systematically investigated. The growth rate of the α-Ga2O3 films was limited by the evaporation of the microdroplets containing gallium acetylacetonate. By adjusting the substrate position (z) from 80 to 50 mm, the growth rate was increased from 307 nm/h to 1.45 μm/h when the growth temperature was fixed at 520 °C. When the growth temperature exceeded 560 °C, ε-Ga2O3 was observed to form at the edges of 2-inch sapphire substrate. Phase control was achieved by adjusting the growth temperature. When the growth temperature was 540 °C and the substrate position was 50 mm, the full-width at half maximum (FWHM) of the rocking curves for the (0006) and (10-14) planes were 0.023° and 1.17°. The screw and edge dislocations were 2.3 × 106 and 3.9 × 1010 cm-2, respectively. Furthermore, the bandgaps and optical transmittance of α-Ga2O3 films grown under different conditions were characterized utilizing UV-visible and near-IR scanning spectra. -
References
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