Chin. J. Semicond. > 2007, Volume 28 > Issue 10 > 1594-1598

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Design and Fabrication of Resonant Tunneling Transistor with RTD/HEMT in Series Structure

Liang Huilai, Guo Weilian, Song Ruiliang, Qi Haitao, Zhang Shilin, Hu Liuchang, Li Jianheng, Mao Luhong, Shang Yuehui, Feng Zhen, Tian Guoping and Li Yali

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Abstract: The design and fabrication of a resonant tunneling transistor with an RTD/HEMT in-series structure are presented.The measurement results of the fabricated devices show that the maximum peak valley current ratio (PVCR) is 17.6∶1,the gate voltage modulating peak voltage ratio is in the range of 1.5~7.7,and the -3dB cut-off frequency is about 4GHz.This device is compatible with HEMTs in the device structure and fabrication technology,and can be used in high speed circuits with HEMTs devices.

Key words: RTTRTDHEMTtransconductance cut off frequencyPVCR

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    Received: 18 August 2015 Revised: 12 June 2007 Online: Published: 01 October 2007

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      Liang Huilai, Guo Weilian, Song Ruiliang, Qi Haitao, Zhang Shilin, Hu Liuchang, Li Jianheng, Mao Luhong, Shang Yuehui, Feng Zhen, Tian Guoping, Li Yali. Design and Fabrication of Resonant Tunneling Transistor with RTD/HEMT in Series Structure[J]. Journal of Semiconductors, 2007, In Press. Liang H L, Guo W L, Song R L, Qi H T, Zhang S L, Hu L C, Li J H, Mao L H, Shang Y H, Feng Z, Tian G P, Li Y L. Design and Fabrication of Resonant Tunneling Transistor with RTD/HEMT in Series Structure[J]. Chin. J. Semicond., 2007, 28(10): 1594.Export: BibTex EndNote
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      Liang Huilai, Guo Weilian, Song Ruiliang, Qi Haitao, Zhang Shilin, Hu Liuchang, Li Jianheng, Mao Luhong, Shang Yuehui, Feng Zhen, Tian Guoping, Li Yali. Design and Fabrication of Resonant Tunneling Transistor with RTD/HEMT in Series Structure[J]. Journal of Semiconductors, 2007, In Press.

      Liang H L, Guo W L, Song R L, Qi H T, Zhang S L, Hu L C, Li J H, Mao L H, Shang Y H, Feng Z, Tian G P, Li Y L. Design and Fabrication of Resonant Tunneling Transistor with RTD/HEMT in Series Structure[J]. Chin. J. Semicond., 2007, 28(10): 1594.
      Export: BibTex EndNote

      Design and Fabrication of Resonant Tunneling Transistor with RTD/HEMT in Series Structure

      • Received Date: 2015-08-18
      • Accepted Date: 2007-03-27
      • Revised Date: 2007-06-12
      • Published Date: 2007-09-26

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