| Citation: |
Feng Chun, Wang Xiaoliang, Wang Xinhua, Xiao Hongling, Wang Cuimei, Hu Guoxin, Ran Junxue, Wang Junxi. A Carbon Monoxide Gas Sensor Based on an AlGaN/GaN Structure[J]. Journal of Semiconductors, 2008, In Press.
Feng C, Wang X L, Wang X H, Xiao H L, Wang C M, Hu G X, Ran J X, Wang J X. A Carbon Monoxide Gas Sensor Based on an AlGaN/GaN Structure[J]. J. Semicond., 2008, 29(7): 1387.
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A Carbon Monoxide Gas Sensor Based on an AlGaN/GaN Structure
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Abstract
This paper reports gas sensors based on an AlGaN/GaN structure for CO detection.The devices have been fabricated and showed remarkable sensitivity at measured temperatures.Response characteristics of the devices have been measured under different CO concentrations (1%,9000ppm,8000ppm,5000ppm,1000ppm) at 50℃.For the sake of comparison,the response of the device induced by 1% CO at 100℃ has also been measured.The sensitivity and variation of Schottky barrier height induced by 1% CO have been calculated at 50℃ and 100℃,respectively.Finally,the sensitivity strongly depends on the temperature and the CO concentration and increased as the temperature and concentration increased.-
Keywords:
- AlGaN/GaN,
- CO,
- gas sensors
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References
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