Chin. J. Semicond. > 1996, Volume 17 > Issue 5 > 365-369
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硅（外延）片表面结构缺陷的光学无损检测

邓江东，李增发，张光寅，颜彩繁，王宏杰

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    Received: 18 August 2015 Revised: Online: Published: 01 May 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(5): 365-369
      邓江东，李增发，张光寅，颜彩繁，王宏杰. 硅（外延）片表面结构缺陷的光学无损检测[J]. 半导体学报(英文版), 1996, 17(5): 365-369.
      Citation:
      邓江东，李增发，张光寅，颜彩繁，王宏杰. 硅（外延）片表面结构缺陷的光学无损检测[J]. 半导体学报(英文版), 1996, 17(5): 365-369.
      shu

      • Received Date: 2015-08-18

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