| Citation: |
Wu Wengang, Li Yi, Huang Fengyi, Han Xiang, Zhang Shaoyong, Li Zhihong, Hao Yilong. MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating[J]. Journal of Semiconductors, 2006, In Press.
Wu W G, Li Y, Huang F Y, Han X, Zhang S Y, Li Z H, Hao Y L. MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating[J]. Chin. J. Semicond., 2006, 27(4): 662.
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MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating
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Abstract
A novel MEMS inductor consisting of a planar single crystalline silicon spiral with a copper surface coating as the conductor is presented.Using a silicon-glass anodic bonding and deep etching formation-and-release process,a 40μm-thick silicon spiral is formed,which is suspended on a glass substrate to eliminate substrate loss.The surfaces of the silicon spiral are coated with highly conformal copper by electroless plating to reduce the resistive loss in the conductor,with thin nickel film plated on the surface of the copper layer for final surface passivation.The fabricated inductor exhibits a self-resonance frequency higher than 15GHz,with a quality factor of about 40 and an inductance of over 5nH at 11.3GHz.Simulations based on a compact equivalent circuit model of the inductor and parameter extraction using a characteristic-function approach are carried out,and good agreement with measurements is obtained. -
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