| Citation: |
WEI Hua-zheng, GUO Fang-min, LAI Zong-sheng, ZHU Shou-zheng, ZHU Zi-qiang, LI Xiao-wei, CHENG Zhi-qun, SUN Xiao-wei. Computer-Aided Design of RF-MEMS Switch[J]. Journal of Semiconductors, 2002, In Press.
. Computer-Aided Design of RF-MEMS Switch[J]. J. Semicond, 2002, In Press.
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Computer-Aided Design of RF-MEMS Switch
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Abstract
A RF MEMS switch is designed by computer aided design (CAD) method.The transmission line loss of the coplanar waveguide (CPW) and the equivalent circuit model of the microelectromechanical systems (MEMS) switch are simulated using Agilent ADS software.The actuation voltage of the switch is also analysed by ANSYS software.Significant simulation results of the shunt capacitive switch,operating at 35GHz,are obtained.-
Keywords:
- shunt capacitive switch,
- MEMS,
- CPW,
- ADS,
- ANSYS
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References
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