Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 509-512

Photonic Crystal Vertical Cavity Surface Emitting and Detecting Photodiodes

Song Qian, Xu Xingsheng, Hu Haiyang, Lu Lin, Wang Chunxia, Du Wei, Liu Famin and Chen Hongda

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Abstract: A photonic crystal confined vertical‘cavity surface-emitting lasers was obtained under continuous operate at about 980nm wavelength·The experiments research’such as the spectrum analysis of GaAs materials,the oxidized processing and the photonic crystal fabrication,are detailed presented.A photonic crystal resonant cavity enhanced photodiode,which was based on the same materials of PC-VCSEL,was fabricated by wet·chemical etching and ICP etching techniques.

Key words: hotonic-crystalVCSELphoton surface-integrating

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Song Qian, Xu Xingsheng, Hu Haiyang, Lu Lin, Wang Chunxia, Du Wei, Liu Famin, Chen Hongda. Photonic Crystal Vertical Cavity Surface Emitting and Detecting Photodiodes[J]. Journal of Semiconductors, 2007, 28(S1): 509-512. ****Song Q, Xu X S, Hu H Y, Lu L, Wang C X, Du W, Liu F M, Chen H D. Photonic Crystal Vertical Cavity Surface Emitting and Detecting Photodiodes[J]. Chin. J. Semicond., 2007, 28(S1): 509.
      Citation:
      Song Qian, Xu Xingsheng, Hu Haiyang, Lu Lin, Wang Chunxia, Du Wei, Liu Famin, Chen Hongda. Photonic Crystal Vertical Cavity Surface Emitting and Detecting Photodiodes[J]. Journal of Semiconductors, 2007, 28(S1): 509-512. ****
      Song Q, Xu X S, Hu H Y, Lu L, Wang C X, Du W, Liu F M, Chen H D. Photonic Crystal Vertical Cavity Surface Emitting and Detecting Photodiodes[J]. Chin. J. Semicond., 2007, 28(S1): 509.

      Photonic Crystal Vertical Cavity Surface Emitting and Detecting Photodiodes

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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